JPS6363739U - - Google Patents
Info
- Publication number
- JPS6363739U JPS6363739U JP15905086U JP15905086U JPS6363739U JP S6363739 U JPS6363739 U JP S6363739U JP 15905086 U JP15905086 U JP 15905086U JP 15905086 U JP15905086 U JP 15905086U JP S6363739 U JPS6363739 U JP S6363739U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- chamber
- sensing element
- element storage
- pressure sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15905086U JPS6363739U (en]) | 1986-10-16 | 1986-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15905086U JPS6363739U (en]) | 1986-10-16 | 1986-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6363739U true JPS6363739U (en]) | 1988-04-27 |
Family
ID=31083118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15905086U Pending JPS6363739U (en]) | 1986-10-16 | 1986-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6363739U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012140846A1 (ja) * | 2011-04-12 | 2012-10-18 | パナソニック株式会社 | Ｍｅｍｓ圧力センサ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5445187A (en) * | 1977-09-16 | 1979-04-10 | Nec Corp | Pressure detector |
| JPS5658632A (en) * | 1979-10-18 | 1981-05-21 | Seikosha Co Ltd | Pressure detecting device |
-
1986
- 1986-10-16 JP JP15905086U patent/JPS6363739U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5445187A (en) * | 1977-09-16 | 1979-04-10 | Nec Corp | Pressure detector |
| JPS5658632A (en) * | 1979-10-18 | 1981-05-21 | Seikosha Co Ltd | Pressure detecting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012140846A1 (ja) * | 2011-04-12 | 2012-10-18 | パナソニック株式会社 | Ｍｅｍｓ圧力センサ |
| JP5118785B2 (ja) * | 2011-04-12 | 2013-01-16 | パナソニック株式会社 | Ｍｅｍｓ圧力センサ |